Steinmeyer Groups ultracompact polarization filter for DUV lithography delivers high precision and particle-free performance. Measuring 120×180×31 mm, this retrofit module incorporates three independent filter positions with 75 mm travel, driven by three DC motors. It achieves 1.5 µm accuracy in a continuous dry nitrogen atmosphere. Designed for maintenance-free 24/7 operation, the filter uses a dry-run stainless steel and PEEK lead screw to minimize wear without liquid lubrication, ensuring stable performance.
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Steinmeyer Group Leads Custom Semiconductor Positioning Solutions with Excellence
Der Gleitgewindetrieb hat einen Spindeldurchmesser von 3 mm (Foto: Steinmeyer Gruppe)
In semiconductor production, the Steinmeyer Group in Dresden delivers tailor-made positioning solutions meeting stringent customer requirements. As Europes largest ICT, microelectronics, and precision technology hub in Silicon Saxony, the company draws on over four centuries of expertise in drive systems, positioning, and measurement. Partnering with Feinmess Suhl, it engineers advanced systems designed to exceed the most demanding standards for cleanliness, process reliability, throughput, lifespan, and accuracy in critical fabrication environments.
Ultra-Compact 120×180×31 mm Polarizer Module Enables Automated DUV Lithography
The supplementary polarization filter module measures 120 by 180 by 31 millimeters, integrating three planar filter elements across a 15-millimeter vertical profile. Each independent carriage provides 75 millimeters of precise lateral travel powered by three electronically commutated DC motors. These drive dry-running sliding spindle assemblies, ensuring accurate and efficient beam orientation. Designed as an add-on for existing wafer steppers, this unit streamlines ultraviolet exposure processes through miniaturization and automated positioning.
Nitrogen Inert Atmosphere Achieves Vacuum-like Tribology With Stainless Steel
Die Kombination aus nicht-rostendem Edelstahl (Spindel) (Foto: Feinmess Suhl GmbH)
Operating in an oxygen-free nitrogen atmosphere replicates tribological conditions similar to high vacuum, presenting critical engineering challenges. Surfaces must remain smooth, minimize gas emission, and generate negligible particulates to preserve purity. Steinmeyer and Feinmess Suhl chose corrosion-resistant stainless steel shafts paired with PEEK nuts containing solid lubricating fillers. This material pairing delivers reliable dry seamless sliding operation, effective heat dissipation, and sustained dimensional stability, all achieved without any fluid lubrication.
High-precision dry-running M3x1P0.5 drive ensures 1.5µm accuracy over decade
Feinmess Suhl developed a dry-running sliding screw drive using threaded rolling (M3x1P0.5, 3 mm spindle diameter, 112 mm length), achieved through a swarf-free cold forming process that delivers exceptional surface finish and prolonged wear resistance. Its self-locking capability secures positions without auxiliary elements, providing repeatability within 1.5 ?m. Constructed robustly, the drive meets stringent stability requirements, ensuring reliable performance and operational integrity over a ten-year lifespan in demanding industrial applications.
Vacuum-compatible components assembled ISO6 cleanrooms, cleaned to ISO14644-1 Class1
Ultrakompakte, hochpräzise Positionierlösung zur Wafer-Belichtung (Foto: Bild: Steinmeyer Gruppe)
All components are engineered for vacuum compatibility, assembled in ISO class 6 certified cleanrooms, and cleaned to ISO 14644-1 class 1 standards. A flexible cleanroom infrastructure exceeding 3,900 square meters supports production requirements, while nitrogen inert gas packaging ensures contamination-free transportation. Close collaboration among drive technology, positioning technology, and precision measurement expertise centers accelerates development cycles and facilitates tailored, application-specific solutions, delivering particle-controlled modules optimized for demanding semiconductor fabrication environments.
Steinmeyer Offers Dry-Lubricated Screws And Precision Liquid-Lubricated Ball Screws
August Steinmeyer supplements its dry-lubricated worm screw actuators with high-precision ball screws featuring specialized liquid lubrication. Selecting the ideal drive mechanism according to specific application requirements ensures peak performance across various semiconductor processes. From wafer handling and inspection to extreme ultraviolet positioning, the companys combined engineering expertise guarantees consistency and accuracy. This tailored approach delivers cost-effective, dependable motion solutions designed to meet the stringent operational demands of modern chip fabrication.
The ultracompact form factor, combined with dry-running stainless steel and PEEK sliding spindle drives, cleanroom manufacturing, and modular integration, positions the DUV polarization filter from Steinmeyer and Feinmess Suhl as an innovative solution. Users achieve submicron alignment accuracy, reduced contamination risk and enhanced process throughput, and maintenance-free operation. This development demonstrates collaborative engineering excellence in Silicon Saxony and highlights Steinmeyer’s role as a trusted precision technology partner for semiconductor fabrication.
